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半導體
Semiconductor
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二手設備與維修
Used Equipment
設備清單
Equipment
SPTS / STS(6)
SUSS(2)
TEL(1)
KLA(1)
E-Gun(2)
BPS (Unaxis)(1)
EO TECHNICS(1)
HITACHI(1)
Amida(1)
Nikon(1)
WAFTECH(1)
MACHVISION(1)
SPANDNIX(1)
RECIF(1)
RVSI / Rudolph(1)
零組件清單
Components
Chiller(3)
ESC(14)
Power supply & Generator(17)
Heater(4)
Match Unit(7)
Pressure Controller & MFC(27)
PCB(26)
Pump & Controller(10)
Robot(4)
Valve & Controller(8)
Others(92)
保養維修
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服務清單 Service List(3)
HORIBA Mass Flow Controller GAS: C4F8 200sccm
HORIBA Mass Flow Controller GAS: He 300sccm
Fujikin MFC GAS: N2 FCST1005LC-4J2-F200-N2
Fujikin MFC GAS: N2 FCST1005MLC-4J2-F200-N2
Millipore Tylan MFC 2900 Series-(FC2901 4V Viton)
Tylan MFC 2900 Series-(FC2901 4V Viton)
MKS Pressure Controller Valve Type 649
1160B-00200RK Mass flow controller GAS: CHF3
1106B-00200RK Mass flow controller GAS: N2 200 sccm
Mass flow controller GAS: NH3 11479A51CR1BMCD
Mass flow controller GAS:N2 SiH4 1479A13CR1BMBZCN
Mass Flow Controller GAS: SiCl4 SEC-Z719J
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關於鴻鎷
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