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半導體
Semiconductor
光電業
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陶瓷
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SiC
石英
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Porous Ceramic
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二手設備與維修
Used Equipment
設備清單
Equipment
SPTS / STS(6)
SUSS(2)
TEL(1)
KLA(1)
E-Gun(2)
BPS (Unaxis)(1)
EO TECHNICS(1)
HITACHI(1)
Amida(1)
Nikon(1)
WAFTECH(1)
MACHVISION(1)
SPANDNIX(1)
RECIF(1)
RVSI / Rudolph(1)
零組件清單
Components
Chiller(3)
ESC(14)
Power supply & Generator(17)
Heater(4)
Match Unit(7)
Pressure Controller & MFC(27)
PCB(26)
Pump & Controller(10)
Robot(4)
Valve & Controller(8)
Others(92)
保養維修
Maintenance
客製化服務
Customized Service
服務清單 Service List(3)
MKS Dual-Zone Pressure Controller DPCA-26028
Brooks GF125CXXC Mass Flow Controller GAS: CO 300sccm
HORIBA Mass Flow Controller (MFC) GAS: C4F8 200SCCM
HORIBA Mass Flow Controller (MFC) GAS: NF3 500SCCM
HORIBA Mass Flow Controller (MFC) GAS: HBr 500SCCM
HORIBA Mass Flow Controller (MFC) GAS: H2 1000SCCM
HORIBA SEC-N112MGRW Mass Flow Controller ,Gas: Ar,100sccm
HORIBA SEC-E40 Mass Flow Controller Gas: Ar 100sccm
HORIBA SEC-E40 Mass Flow Controller Gas: O2,100sccm
MKS 1160B-00100RK Mass Flow Controller,Gas: N2,100sccm
HORIBA Mass Flow Controller (MFC) Gas: C4F6,30 sccm
HORIBA Mass Flow Controller (MFC) GAS:CH3OH 50sccm
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