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二手設備與維修
Used Equipment
設備清單
Equipment
SPTS / STS(6)
SUSS(2)
TEL(1)
KLA(1)
E-Gun(2)
BPS (Unaxis)(1)
EO TECHNICS(1)
HITACHI(1)
Amida(1)
Nikon(1)
WAFTECH(1)
MACHVISION(1)
SPANDNIX(1)
RECIF(1)
RVSI / Rudolph(1)
零組件清單
Components
Chiller(3)
ESC(14)
Power supply & Generator(17)
Heater(4)
Match Unit(7)
Pressure Controller & MFC(27)
PCB(26)
Pump & Controller(10)
Robot(4)
Valve & Controller(8)
Others(92)
保養維修
Maintenance
客製化服務
Customized Service
服務清單 Service List(3)
HORIBA LSC-TH100-00001 Liquid Source Controller
AMAT IPC-E062/756-752000 Column Pump Control
EBARA A30W Dry Pump
Shimadzu EI-RO4M Turbo Molecular Pump Controller
PFEIFFER TMH-520 Turbo Pump
Shimadzu TMP-X3407LMTC Turbo Molecular Pump
Shimadzu TMP-2404LMC Turbo Molecular Pump
TECO Rietschle Thomas VC 50 VacFox Vacuum Pump
PFEIFFER TCP600 Turbo Molecular Vacuum Pump Controller
Shimadzu TMP-1303LMTG Turbo Molecular Pump
1
關於鴻鎷
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