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二手設備與維修
Used Equipment
設備清單
Equipment
SPTS / STS(6)
SUSS(2)
TEL(1)
KLA(1)
E-Gun(2)
BPS (Unaxis)(1)
EO TECHNICS(1)
HITACHI(1)
Amida(1)
Nikon(1)
WAFTECH(1)
MACHVISION(1)
SPANDNIX(1)
RECIF(1)
RVSI / Rudolph(1)
零組件清單
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Chiller(3)
ESC(14)
Power supply & Generator(17)
Heater(4)
Match Unit(7)
Pressure Controller & MFC(27)
PCB(26)
Pump & Controller(10)
Robot(4)
Valve & Controller(8)
Others(92)
保養維修
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服務清單 Service List(3)
LAM 810-800156-202 Water Leak Detector Board
TEL 3308-000136-14 1VM PCB
LAM NODE TYPE 3 PHASE II PCB (PN:810-800256-015)
LAM NODE BD LONRS485/RS232 GATEWAY (PN:810-802799-115)
AXCELIS SIMF LOADER CONTROL BOARD (PWB ASSY:414503)
LAM Node Board, Control Type 3 (PN:810-800256-207)
LAM 853-049543-173 NODE BOARD, 24 CH TEMP CTLR
LAM 810-800081-015 P2 MB Motherboard VME Etch Assembly
LAM 605-707109-002 ENGENUITY SYSTEMS PCB,ASY B105-0102
LAM 605-707109-012 ENGENUITY SYSTEMS PCB,6004-0100-12
LAM 810-099175-008 VIOP PHASE III PCB
LAM 810-099175-011 VIOP PHASE III PCB
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