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服務清單 Service List(3)
DAIHEN FGA-30G 3kW RF GENERATOR
Advanced Energy Pinnacle 10KW RF Generator 3152436-356H
MKS C5002-05 2MHz 5KW RF Generator, 660-124460-635
MKS LVG3527A-11BA-05 27MHz RF Generator, 660-072825-625
Dressler CESAR 136D-RF Generator
ENI LPG-6A RF GENERATOR
ENI ACG-3PL2 RF GENERATOR
Agilent E3630A DC Power Supply
HEROLCHI HEC-300LR-AT Power Supply
Advanced Energy PEX 2013 3156113-024 RF Generator P/N 660-063437-003
Advanced Energy RF Generator P/N 660-088884-002
SPTS (STS) ICP Power Supply
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