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二手設備與維修
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SPTS / STS(6)
SUSS(2)
TEL(1)
KLA(1)
E-Gun(2)
BPS (Unaxis)(1)
EO TECHNICS(1)
HITACHI(1)
Amida(1)
Nikon(1)
WAFTECH(1)
MACHVISION(1)
SPANDNIX(1)
RECIF(1)
RVSI / Rudolph(1)
零組件清單
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Chiller(3)
ESC(14)
Power supply & Generator(17)
Heater(4)
Match Unit(7)
Pressure Controller & MFC(27)
PCB(26)
Pump & Controller(10)
Robot(4)
Valve & Controller(8)
Others(92)
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服務清單 Service List(3)
LAM 666-068437-003 SNSR,TEMP,FLUOROPTIC,CONTACT
LAM 839-059874-401 Parts
COMET CVMI-1000AC/5-BAC-L 電容
VAT 910XX-YY12-ACN6 Metal Bellows Prime Mover
Advanced Energy 3152288-000 Gencal Power Meter
LAM 678-109745-005 Watlow St Louis FireRod
AMAT 0090-A0693 PMT-100 Detector ASSY
AMAT 0129-9535-23S LASER W F.O CABLE, Spectra-Physics
AMAT 0010-34322 ASSY 150mm Susceptor
AMAT 0010-17814 ASSY Endpoint Detector WXZ 300mm
AMAT 0010-02741 PLASMA CHUCK ASSY 150mm / 125mm
LAM 734-026525-001 MICROSEAL Seal Surface Mount
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關於鴻鎷
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