SPTS Pegasus in deep reactive-ion etching (DRIE) is the most cost-effective mass-produced model.

We Offer:
1. Refurbished full functional systems
2. Systems re-location, Upgrade, Maintenance & troubleshooting
3. Major control modules & spare parts ( Consumable & non-Consumable )
 

．Refurbished full functional systems:

1. CPX Pegasus
2. MACS ICP HR
3. Multiplex ICP SR

．Major control modules & spare parts:

1. ESC：FB319626 (200 mm), FB321943 (150 mm), FB716296 (150 mm)
2. RF loops：Coil Power, Platen Power, SOI Kits
3. PM kit：Completed PM package, include engineering service.
4. Control modules：Dry/turbo pumps, Chiller, APC, MFCs, Heater Controller ……
5. Consumable spares：more than 150 items
 

．We have A TEAM with Well Trained & experienced engineers.

1. 3 Well Trained & Experienced FAE On-Site
2. More than 20 tools refurbished ( SR ,HR , Pegasus , AOE , Rapier )
3. On-Site troubleshooting & maintenance.
4. On-Site training for tool PM, Operation.
 

．Our experienced & records:

1. > 50 tools installation.
2. >10 tools relocation.
3. >20 tools refurbished to well functions.
4. Sufficient & continue spare parts supply.